IEEE Transactions on Semiconductor Manufacturing (T-SCM)

Availability: free for staff and students of Hamburg University of Applied Sciences
Licensed Period: IEEE Electronic Library (IEL) Fachhochschulkonsortium: Vol. 1, Iss. 1 (1988) -   ReadMe
Fulltext: https://ieeexplore.ieee.org/servlet/opac?punumber=66
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Fulltext available since: Volume 1 , H. 1 (1988)
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
ZDB-ID: 2035198-7
Subject(s):
Tag(s): Halbleitertechnologie
E-ISSN(s): 1558-2345
P-ISSN(s): 0894-6507
Appearance: Fulltext, online and print
Costs: subject to fee
Comment: Volltextzugang via IEEE/IEE Electronic Library (IEL)
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