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Availability:
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not accessible
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Homepage(s):
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Fulltext available since:
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Volume 1
, H. 1
(1983)
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Publisher:
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American Vacuum Society (AVS)
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ZDB-ID:
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3117331-7
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Subject(s):
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Electrical Engineering, Electronics and Communications Engineering, Physics
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Tag(s):
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Vakuumtechnik; Halbleitertechnologie
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E-ISSN(s):
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2166-2754
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P-ISSN(s):
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0734-211X, 1071-1023, 2166-2746
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Appearance:
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Fulltext, online and print
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Costs:
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subject to fee
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Comment:
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Hervorgegangen aus: Journal of Vacuum Science and Technology (0022-5355)
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List of participate institutions which offer full access.
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