Availability:
|
not accessible
|
Homepage(s):
|
|
Fulltext available since:
|
Volume 1
, H. 1
(1983)
|
Publisher:
|
American Vacuum Society (AVS)
|
ZDB-ID:
|
3117331-7
|
Subject(s):
|
Electrical Engineering, Electronics and Communications Engineering, Physics
|
Tag(s):
|
Vakuumtechnik; Halbleitertechnologie
|
E-ISSN(s):
|
2166-2754
|
P-ISSN(s):
|
0734-211X, 1071-1023, 2166-2746
|
Appearance:
|
Fulltext, online and print
|
Costs:
|
subject to fee
|
Comment:
|
Hervorgegangen aus: Journal of Vacuum Science and Technology (0022-5355)
|
|
List of participate institutions which offer full access.
|