Materials Science in Semiconductor Processing

Availability: free for staff and students of Hamburg University of Applied Sciences
Licensed Period: Elsevier DEAL Archive: Vol. 1 (1998) - Vol. 152 (2022)   ReadMe
Licensed Period: Vol. 1, Iss. 1 (1998) - Vol. 72 (2017)   ReadMe
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Fulltext available since: Volume 1 , H. 1 (1998)
Publisher: Elsevier
ZDB-ID: 2029689-7
Subject(s): Electrical Engineering, Electronics and Communications Engineering, Mechanical Engineering
Tag(s): Halbleitertechnologie,Werkstoffkunde
E-ISSN(s): 1873-4081
P-ISSN(s): 1369-8001
Appearance: Fulltext, online and print
Costs: subject to fee
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